JPH0540442Y2 - - Google Patents
Info
- Publication number
- JPH0540442Y2 JPH0540442Y2 JP11149788U JP11149788U JPH0540442Y2 JP H0540442 Y2 JPH0540442 Y2 JP H0540442Y2 JP 11149788 U JP11149788 U JP 11149788U JP 11149788 U JP11149788 U JP 11149788U JP H0540442 Y2 JPH0540442 Y2 JP H0540442Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- differential pressure
- pressure sensor
- sensitive diaphragm
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000126 substance Substances 0.000 claims description 11
- 238000005192 partition Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 54
- 238000005259 measurement Methods 0.000 description 10
- 239000012528 membrane Substances 0.000 description 8
- 238000007789 sealing Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000003566 sealing material Substances 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11149788U JPH0540442Y2 (en]) | 1988-08-25 | 1988-08-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11149788U JPH0540442Y2 (en]) | 1988-08-25 | 1988-08-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0232044U JPH0232044U (en]) | 1990-02-28 |
| JPH0540442Y2 true JPH0540442Y2 (en]) | 1993-10-14 |
Family
ID=31349596
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11149788U Expired - Lifetime JPH0540442Y2 (en]) | 1988-08-25 | 1988-08-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0540442Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5402103B2 (ja) * | 2009-03-09 | 2014-01-29 | 凸版印刷株式会社 | ガス透過度測定装置 |
-
1988
- 1988-08-25 JP JP11149788U patent/JPH0540442Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0232044U (en]) | 1990-02-28 |
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